氧化物阴极纳米发射涂层制备方法研究

摘要

Oxide cathode has been widely used as electron emission source in vacuum electronic devices. A nanoparticle carbonate is synthesized by the gas-liquid synthetic method. Synthetic process of nanoparticle carbonate and preparation of nano-emitting layer are shown. The structure of Nano-emitting layer is analyzed by scanning electron microscope. The SEM images show that the cracking problem can be resolved by adjusting amplitude and frequency of the cathode filament current.%采用改进气-液相法合成的一种颗粒状的纳米三元碳酸盐。详细介绍了纳米碳酸盐的合成工艺流程以及碳酸盐悬浊液的配制工艺流程。利用扫描电子显微镜研究了纳米涂层的分解工艺要求，通过调整阴极灯丝电流增加幅度和频率，解决了纳米涂层分解激活过程中开裂问题，保证了阴极发射的稳定性和可靠性。