利用SEM分析了高压铝电解电容器用阳极腐蚀箔的形貌,采用圆孔隧道模型和圆孔并孔隧道模型,分别建立了腐蚀箔孔径、孔筋厚度与其比电容之间的关系.研究和计算结果表明,线状并孔可以提高实用比电容;为保证折弯强度(孔筋厚度在0.40 μm左右),腐蚀隧道孔径控制在1.06 μm,孔密度为2.6×107个/cm2;对于隧道孔深为50 μm,520 V化成电压下阳极箔实用比电容可达到0.92×10–6F·cm–2,为国产高性能高压阳极箔提供理论指导.%The surface morphology of high-voltage anode foil for aluminum electrolytic capacitor was analyzed with SEM, and then the relationship of specific capacitance of the etched foils with pit diameter (d) and distance of two adjacent etched pits (a2) was theoretically calculated using two kinds of etching-tunnel models (circular tunnel and circular-coalition tunnel). The results show that linear coalition can improve the practical specific capacitance of etching foil. The optimal structural parameters of the etched foils with high practical specific capacitance are as follows: a2should be controlled at about 0.40 μm to ensure the requirement of mechanical strength, and the pit diameter should be 1.06 μm as well as the pit density should be 2.6×107unit/cm2. When the tunnel length is 50 μm, the practical specific capacitance can reach 0.92×10–6F·cm–2at the formed voltage of 520 V. The obtained information can be helpful for achieving high performance of domestic etched foils.
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