大口径方形非球面镜的高效磨削技术研究

摘要

本文基于X/Y/Z三直线轴平面磨床,研究了圆弧砂轮应用于大口径方形非球面镜的平行磨削新技术,介绍了圆弧砂轮平行磨削的机理、重点解决了砂轮形状误差在线检测、元件面形误差在线检测与误差补偿等关键技术问题.以430 mm×430 mm非球面镜为样件,进行了多轮高效精密磨削工艺实验,面形精度PV均值为4.2μm,表面粗糙度约0.1μm(RMS).%Based on X/Y/Z 3-axis grinding machine, the arc grinding wheel parallel ghnding technology for large square aspherical lens was discussed in this paper.The mechanism of arc wheel parallel grinding was introduced, the key problems, such as on-line mesurement for wheel form error, on-line mesurement and compensation for workpiece form error, were solved.Mean results from many runs of high efficiency precision grinding experiments showed that, the surface form error and surface roughness of 430 mm × 430 mm aspherical lens attained PV 4.2 μm and RMS 0.1 μm respectively.