化学机械抛光在光学晶体加工中的应用

摘要

Intensive investigation on crystal materials accelerated the development of modern science and technology, and the demand for various crystals has been increasing. The surface processing of crystals has become a research focus because ultra-smooth surface is needed in many application fields, In this research, we introduce the development of chemical mechanical polishing of a few kinds of crystals including saphire, LiNbO3, LiB3 O5, CdZnTe, MgO, SiC and InSb, discuss the existing problems and the developing trend in the CMP field of the crystals.%晶体材料的深入研究加速了现代科学技术的发展,其需求量也迅速增加.在很多应用领域要求晶体的表面超光滑,因此晶体表面处理和加工成为目前研究的热点.介绍了几种典型光学晶体(蓝宝石晶体、铌酸锂晶体、三硼酸锂晶体、碲锌镉晶体、氧化镁晶体、碳化硅晶体和锑化铟晶体)化学机械抛光的最新研究成果,并探讨了光学晶体化学机械抛光存在的问题及发展趋势.