修整技术及提高固结磨料研磨垫自修整性的研究

摘要

随着化学机械研磨的持续进行,垫表面特征会发生变化,从而使其研磨能力大大降低.修整垫可改善表面轮廓,进而提高被加工晶片表面质量,而且可以减少表面缺陷,延长使用寿命.本文着重介绍固结磨料研磨垫常见修整技术,分为非自修整和自修整两种类型,非自修整法有高压水射流修整、超声波振动法修整、金刚石修整器修整.并重点阐述通过合理选用研磨液、添加成孔剂以及优化研抛工艺参数等措施来促进亲水性固结磨料研磨垫自修整.%The surface features of abrasive pad deform during chemical mechanical polishing and as a result the polishing ability of the pad is dramatically reduced.Pad conditioning improves the pad surface profile and consequently the wafer profile.In addition,it reduces defects on pad surface and prolongs its service life.The conditioning technologies of fixed-abrasive pad are introduced in this paper,which can be divided into two types,namely non-self-conditioning and self-conditioning.High pressure water jet,ultrasonic vibration and diamond dresser etc are non-self-conditioning methods.The methods of improving the self-conditioning of hydrophilic fixed polishing pad are emphasized.Choosing proper slurry,adding soluble and optimizing the lapping process parameters can benefit the self-conditioning process.