A Novel Integrated PZT-Driven Micropump and Microvalve

摘要

According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyisiloxane (PDMS) and silicon chip.The thickness of the micropump membrance is about 180μm.The diameter and the depth of micropump chamber cavity are 6 mm and 40μm,respectively.The performances of the micropump,such as pump rate and backpressure,were characterized.As a flow-rectifying element,the diffusers and active valve were used instead of passive check valves.The flow rate and the backpressure of the micropump are about 420μL/min and 2 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz.