Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China Center of Composite Materials, Harbin Institute of Technology, Harbin 150001, China;
Tetrahedral; amorphous; carbon,; Filtered; cathodic; vacuum; arc,; Substrate; bias;