IC-CIDS Benemérita Universidad Autónoma de Puebla;
Puebla;
México;
Ex Graduate Research Trainee at Plasma Processing Laboratory;
Chemical Engineering Department;
McGill University;
Montreal;
Canada;
Department of Materials Science and Engineering and Chemical Engineering;
University Carlos III of Madrid and IAAB;
Madrid;
Spain;
Global; Reactions; Model; Silicon; Rich-Oxide; Defects; LPCVD; Luminescence;