Patternable production of SrTiO_(3) nanoparticles using 1-W laser directly on flexible humidity sensor platform based on ITO/SrTiO_(3)/CNT

摘要

Perovskite oxides like S rTiO_(3) at the nanoscale are of interest for eme rging applications,including high-k dielectrics and sensors.However,their synthesis requires long calcination at the elevated temperature,which is a barrier of their application to flexible electronics.Here,an effective laser-assisted sol-gel method to patternably produce S rTiO_(3) na noparticles(-100 nm)in selective areas on polyimide substrates(coated with ITO)is introduced.Importantly,the violet-laser power is just 1 W but sufficient to crystallize the material in a short period(a few seconds).Furthermore,developing a flexible device platform using carbon nanotubes(CNT)and SrTiO_(3) nanoparticles for detection of humidity changes at room temperature is proposed.The sensor platform has both capacitive and resistive sensing abilities.The resistive mode with a lower power usage(about 0.2μW)is suitable for long monitoring of humidity in the range of2%RH and above.The capacitive mode with higher sensitivity,faster response/recovery time(1-3 min),and lower detection limit(0.5%RH)can be used for calibration purposes.The performance of the flexible sensor is still maintained after 5000 bending cycles at 1.5-cm radius.Altogether,our synthesis method and the flexible sensor show chances for mass-producing perovskite oxides at low cost for wearable electronics.