面向自动测试的集成电路制造装备测试模型

摘要

对于典型的集成电路制造装备,提出了一种面向自动测试系统的多层次测试模型;使用层次化建模方法进行建模,将典型集成电路制造装备的测试模型按层次划分为装备级、子系统级和仪器级；利用XML建立了模块化的测试模型的描述,并使用引用的方式实现测试模型的重用;提出了使用时间信息和GUID确定被引用测试模型可用性的算法;该模型被用于具有工艺腔室的典型集成电路制造装备中,提高了测试模型的重用性,并拓展了对不同层次被测对象的测试能力.%This paper proposes a hierarchical test model of typical integrated circuit manufacture equipment for automatic test system. The model use a hierarchical method to build test models for integrated circuit manufacture equipment, which are modeled as three levels of equipment,subsystem and instrument. XML format is used to describe the model and different levels of models are reused by reference. This paper also proposes a validation algorithm to ensure the correctness of referenced models with time information and GUID, The model is applied in a typical IC manufacturing equipment with process chamber, Which can not only improve the reusability of test models but also broaden the test range for different units under test.