The dynamics of laser-induced chemical reactions of GaAs (100) and InP(100) surfaces with chlorine molecules under UV and visible (355 nm and 560 nm) irradiation are studied using a CW supersonic molecular beam and time-resolved mass spectrometry. The major reaction products observed in time-resolved mass spectrometric measurements are GaC1, and InCl, (x=1, 2). The dependence of time-of-flight spectra of the desorbed products on laser wavelength and fluence has been investigated. Furthermore, the obvious enhancement of laser-induced gas-surface reactions by increasing the translational energy of incident chlorine molecules is reported for the first time.
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