一种新型的Pt-LaF3混合膜MISFET结构溶解氧传感器

摘要

Using carbon paste film forming method, a novel all-solid dissolved oxygen sensor based on MISFET structure with Pt-LaF3 mixture film has been described. The sensing mechanism of Pt-LaF3, the device structure, and the response characteristics are analyzed. We have also measured the device characteristics, given the response curves of the ΔVrs (the gate voltage variety)-［O2］(dissolved oxygen concentration) which are bound at different biases and different temperature.According to our experimental results, we can come to the conclusion that the device have proposed to have is feasible to determince the content of dissolved oxygen.%基于碳糊成膜(carbon paste film forming)方法，我们研制了一种MISFET结构的Pt-LaF3混合膜全固态溶解氧传感器.对传感器的器件结构以及Pt-LaF3敏感膜的敏感机制和响应特性进行了分析，并实际测试了器件特性.给出了在不同工作点和不同温度条件下器件的输出电压对溶解氧浓度变化的响应曲线.实验结果表明，我们所提出的器件可以用于测量溶解氧含量.