一种新型两维霍尔角度传感器研究

摘要

A new contactless two-dimensional integrated Hall Angular Detector was presented. A radial permanent magnet is attached to the axis whose angle position α is to be determined. Two orthogonal vertical Hall devices in cross shape, which active sensing area is 150μm×150 μm, measure the magnetic field X,Y components paralled to the chip surface and therefore the angular position α of the axis. When the permanent magnet was rotating, the measured output voltages V-x,V-y by the two pairs of vertical Hall plates were changed correspondingly. The angle α could be obtained by calculating the arc tangent of the signal ratio V-X/V-Y through the software and PC processor. The experimental results show an angular measurement accuracy of ±1° over a full 360° operating range.%本文研制了一种无触点的十字型两维集成垂直霍尔器件，它对平行于芯片表面的磁场敏感.当与被测转角α的物件轴向相固连的径向永久磁铁转动时，平行于芯片表面的磁场分量B-x、B-y大小将发生相对变化，以致集成的两对霍尔板输出电量也产生相应地变化.这时传感器件给出了相对于被测量角度α的两种信号电压(sinα和cosα)，通过arctgn(V-x/V-y)可求得转角α，从而达到测量角度的目的.测量结果表明利用该角度传感器件与PC机组成的测量系统其测量角度的精度可达±1°.