基于LTCC的无线无源压力传感器的研究

摘要

设计了一种基于低温共烧陶瓷(LTCC)的无线无源压力传感器,利用传感器谐振频率对不同应变的响应来表征传感器的应变特性,采用互感耦合的方式对传感器的谐振频率进行读取.搭建了压力测试平台,通过对天线特征参数的测试获取传感器的谐振频率,测试结果表明,基于LTCC的无线无源压力传感器的谐振频率随外界压力的增大而减小,谐振频率随压力的变化近似于线性变化,灵敏度约为543.12 kHz/bar.%A wireless passive pressure sensor based on LTCC (Low-Temperature Co-Fired Ceramics)was designed.The principle of the sensor was based on the change of resonance frequency of the LC circuit with the external pressure.The resonance frequency of sensor was detected by electromagnetic coupling with two inductances.The sensor resonance frequency has been measured by measureing characteristic parameter of antenna through the pressure measurement system designed,experimentally attained results show that the resonance frequency of pressure sensor almost drops linearly as the pressure increases,the sensitivity is about 543.12 kHz/bar.