基于MEMS声传感器的圆柱壳体振动陀螺振型检测技术∗

摘要

振动陀螺谐振子振型一般采用激光进行非接触式测量，这种方法存在设备成本高、操作复杂、效率低等问题，因此，提出了一种基于MEMS声传感器的圆柱壳体振动陀螺谐振子振型测试方法。该方法利用体积小，指向性高的MEMS声传感器对谐振子振动声场进行高分辨率测量，获得精确的谐振子振动分布情况，建立了谐振子声波测试实验系统，进行了测试实验，并与激光测振仪的测量结果进行比对。实验结果表明，该测试系统具有较高的振型测量精度。这种测试方法成本低，操作简便，测量精度高，可以实现谐振子振型的高精度快速测量，为后续的谐振子修形及陀螺控制提供重要基础。%The untouched vibration type testing of vibrating gyroscope is usually based on the using of laser vibrome￣ter,but this method has some problems such as high cost,complex operate,low testing rate etc. A testing method put forward based on MEMS voice sensor which is in micro size with high directivity in voice sensing,and a testing sys￣tem of vibration type is also built. By comparison with the result tested by laser vibrometer,it is proved that the tes￣ting system built with MEMS voice sensor has high precision in vibration type testing with the advantages of low cost and easy operation. It can be used in vibration fast testing and can provide results with high precision which can of￣fer important base for resonator patching and gyroscope control.