具有管控液晶面板设备工艺参数的制造执行系统的技术研究

摘要

由于液晶显示行业材料成本高且生产工艺复杂，不同尺寸的产品需切换不同的工艺参数，频繁换模造成了对工艺参数难以把控，一旦出现将造成较大亏损。本文提出对制造执行系统 MES 进行模块增加，形成一种具有智能化管控工艺参数的设计方案。这种新方案使得 MES 可以实时管控生产工艺参数，并提供后期数据分析，减少生产过程中的人为风险，以提高生产过程的稳定性。%Due to the high cost of the TFT LCD materials,different types of parameters and the un-controlled parameters in the frequent change.Companies will make huge loss if they can not manage all the factors well during the production.This paper proposes a real-time intelligent design method of parameter control by adding extra modules,so that manufacturing execution system(MES)can timely monitor the process parameters,analysis data and reduce human risk factors.Therefore,the stability of the production process will be improved with real-time control.