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Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same
Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same
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机译:具有虚拟计量能力的制造执行系统以及包括该制造执行系统的制造系统
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摘要
A manufacturing execution system (MES) with virtual-metrology capabilities and a manufacturing system including the MES are provided. The MES is built on a middleware architecture (such as an object request broker architecture), and includes an equipment manager, a virtual metrology system (VMS), a statistical process control (SPC) system, an alarm manager and a scheduler. The manufacturing system includes a first process tool, a second process tool, a metrology tool, the aforementioned MES, a first R2R (Run-to-Run) controller and a second R2R controller.
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