采用射频(RF)磁控溅射技术制备了用于全固态薄膜锂电池的非晶态和多晶LiCoO2阴极薄膜,利用XRD和SEM研究了沉积温度对LiCoO2薄膜结构和形貌的影响,并研究了高温退火后薄膜的电化学性能.研究结果表明,随著基片温度的不同,薄膜成分、表面形貌以及电化学行为有明显差异.室温沉积的薄膜很难消除薄膜中Li2CO3的影响,经过高温退火处理后也无法形成有效的多晶LiCoO2薄膜,而150℃沉积的薄膜经过高温退火后形成了有利于锂离子嵌入的多晶LiCoO2结构,薄膜显示出了较好的电化学性能.%Amorphous and oriented polycrystalline LiCoO2 thin films used as a cathode material for all-solid-state thin film battery were fabricated by using RF magnetron sputtering. The effects of substrate temperature on the morphology and structure of LiCoO2 thin films were studied by scanning electron microscopy and X-ray diffraction. The electrochemical properties of LiCoO2 thin films annealed at high temperature were also characterized. The results showed that thin films prepared at different substrate temperatures exhibited distinct difference on the morphology and structure and electrochemical behavior. Li2CO3 existed in the IiCo02 thin film prepared at room temperature and was hard to decompose fully even in high annealing temperature and form polycrystalline LiCoO2. The annealed LiCoO2 thin films which was prepared at the substrate temperature of 150℃ showed polycrystalline structure, which was benefit for lithium ions insertion into LiCoO2 and exhibited good electrochemical properties.
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