微气体传感器测试系统的恒流配气系统研究

摘要

As the importance of the gas mixture for the constant gas flow in the experiments of the micro gas sensor, according to the laws of the Dalton's partial pressure and Amagat, the experimental constant gas distribution system was realized for the use of mass ratio in gas distribution method. With the labvIEW8-5 as software development platform, the software control interface of the constant gas distribution system was designed based on NI USB6215 Series multifunction data acquisition card. The ratio of different concentrations of hydrogen gas mixture was distributed with the MFCs strictly controlled by computer. Gas flow is neatly maintained at 1L/min, fluctuated less than 10mL/min. The cause of the fluctuation in the value of gas flow was analyzed. It provided the probability to further improve the gas distribution system.%针对恒流混合气体在微气体传感器实验中的重要性,根据道尔顿分压定律和阿马伽定律,采用质量比动态配气法,实现了实验用恒流配气系统.基于NI USB6215系列多功能数据采集卡,以LabVIEW8.5为软件开发平台,设计了恒流配气系统软件控制界面.通过计算机严格控制MFCs流量调节,配比出不同浓度氢气混合气体.气体流量始终保持在1L/min,上下波动不超过10mL/min.分析了气体流量值出现波动的原因,为进一步完善恒流配气系统提供了参考.