圆柱形与圆锥形放电腔室中氢等离子体组分与状态研究

摘要

采用圆柱形和圆锥形的放电腔室，使用氢气作为放电气体在不同的射频功率下进行了放电。使用质谱诊断和 Langmuir 探针诊断相结合的方法对两种放电腔室中的氢等离子体的离子组分、离子能量分布(IED)、等离子体电势、电子密度和有效电子温度进行了对比研究。根据等离子体的诊断结果，讨论了圆锥形与圆柱形两种放电腔室中的放电特性。结果表明：圆柱形放电腔室中含有更多的亚稳态氢原子H ∗，而圆锥形放电腔室中含有更多的 H +离子。圆锥形放电腔室中等离子体具有更高的电子密度和离子密度及更低的等离子体电势。%Cylindrical and conical discharge reactors were used for hydrogen discharge at different radio frequency powers.Using mass spectrometry and Langmuir probe,the ion composition,the ion energy distribution (IED),the plasma potential,the electron density and the effective electron temperature were investigated in both the discharge reactors.Based on plasma diagnostic result,the discharge property was discussed in both conical and cylindrical discharge reactors.The results show that there are more H +in conical discharge reactor,but more H ∗ in cylindrical discharge reactor.In addition,it is shown that the electron and ion densities are higher and the plasma potential is lower in conical discharge reactor.