基于模糊Petri网推理的半导体生产线投料控制策略

摘要

Because of large amount of stochastic and uncertain factors in semiconductor wafer fabrication (SWF), we often meet with all kinds of disruptions which make the former optimal scheduling scheme lose superiority.Considering the advantage of the fuzzy Petri-net (FPN) on the knowledge expression and logical reasoning, a releasing control policy for SWF based on FPN is proposed. According to the releasing FPN reasoning model and the real-time data collected from the line,the control method can help to take the feasible releasing action to adopted to different conditions.With the releasing strategy, the throughput of the wafer fabrication can be maximized and the system can be optimized to a large extent. Finally, the effectiveness of this proposed method is confirmed by simulation.%半导体生产线存在大量随机不确定因素,各种不确定扰动的发生,往往使已获得优化调度方案在执行过程中失去优良性,鉴于模糊Petri网在知识表达和逻辑推理方面的优势,本文研究将该思想用于半导体生产线投料控制,构建投料模糊Petri网推理模型,建立完整的在线投料机制,以生产线实时信息为依据,决定系统采取的投料控制行为,以便尽可能发挥系统的生产能力,优化系统制造性能.最后,以某半导体生产线为例进行投料控制实验,结果表明,该策略是可行有效的.