Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

摘要

Hard and brittle materials,such as silicon,SiC,and optical glasses,are widely used in aerospace,military,integrated circuit,and other fields because of their excellent physical and chemical properties.However,these materials display poor machinability because of their hard and brittle properties.Damages such as surface micro-crack and subsurface damage often occur during machining of hard and brittle materials.Ultra-precision machining is widely used in processing hard and brittle materials to obtain nanoscale machining quality.However,the theoretical mechanism underlying this method remains unclear.This paper provides a review of present research on the molecular dynamics simulation of ultra-precision machining of hard and brittle materials.The future trends in this field are also discussed.