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Control of nanogap dimensions in selectively etched nanowire heterostructures.

机译:控制选择性蚀刻的纳米线异质结构中的纳米间隙尺寸。

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摘要

Progress in translating nanoscience into useful nanotechnologies has been limited by an inability to drive down fabrication costs, improve throughputs, and achieve a high level of reproducibility over nanoscale structures and the properties that are controlled by size. One important nanomaterial that has incited substantial interest over the past decade is Porous Anodic Alumina (PAA). [1] The widespread use of PAA as a sacrificial template in the electrochemical synthesis of high-aspect-ratio nanomaterials has been inhibited in large part by complications related to its brittle behavior and the lack of uniformity in pore structure over large areas. The control over the shape of the growth front of electrodeposited materials in a PAA template remains as a significant challenge. This requirement is particularly relevant to "on-wire lithography" (OWL), where the inner segment of a tri-layered electrodeposited nanowire is selectively etched to achieve a nanogap of equivalent dimensionality. [2] Such a nanogap with dimensions controlled at nanometer-scale precision would have the potential to enable practical applications of molecular electronics [3] and nanoplasmonics [4].;In this work, polyethyleneimine (PEI) is used for the planarization of electrodeposited nanowire growth fronts in PAA templates. The addition of highly branched, low molecular weight PEI to an electrolytic bath provides improved uniformity in the relative distribution of nanowire growth rates from pore to pore, and allows for a more precise control over the electrochemical growth process. [5] This utility of PEI is demonstrated for the synthesis of Au-Ag-Au nanowire arrays. Upon the completion of electrodeposition, chemical etching of the Ag segment is performed, leaving behind a nanogap of a width that is determined by the thickness of the Ag segment. The achievement of electrodeposited multicomponent nanowires that yield sub-10 nm gaps in nanowires having a diameter below 100 nm is the only such demonstration to date. Finally, an electro-less process will be described for the deposition of Ag segments that allows for the creation of gaps on the order of a few atomic monolayers of Ag.
机译:将纳米科学转化为有用的纳米技术的进展受到无法降低制造成本,提高生产能力以及无法在纳米级结构和受尺寸控制的特性上实现高水平重现性的限制。在过去的十年中引起人们极大兴趣的一种重要的纳米材料是多孔阳极氧化铝(PAA)。 [1]在很大比例的纳米材料的电化学合成中,PAA作为牺牲模板的广泛使用已在很大程度上受到与其脆性行为和大面积孔结构缺乏均匀性相关的复杂性的抑制。对PAA模板中电沉积材料的生长前沿形状的控制仍然是一项重大挑战。此要求与“在线光刻”(OWL)特别相关,在“ OWL”中,对三层电沉积纳米线的内部段进行选择性蚀刻,以实现等效尺寸的纳米间隙。 [2]具有控制在纳米级精度上的尺寸的纳米间隙将有可能实现分子电子学[3]和纳米等离子体技术[4]的实际应用。在这项工作中,聚乙烯亚胺(PEI)用于电沉积的平面化PAA模板中的纳米线增长前沿。向电解浴中添加高度分支的低分子量PEI,可以提高纳米线从孔到孔的相对分布的均匀性,并可以更精确地控制电化学生长过程。 [5] PEI的这种效用已证明可用于合成Au-Ag-Au纳米线阵列。电沉积完成后,将对Ag段进行化学蚀刻,留下宽度由Ag段厚度决定的纳米间隙。迄今为止,只有在直径小于100 nm的纳米线中产生低于10 nm的间隙的电沉积多组分纳米线才能实现。最后,将描述用于沉积Ag链段的无电工艺,该工艺允许在Ag的几个原子单层的数量级上形成间隙。

著录项

  • 作者

    DaSilva, Manuel.;

  • 作者单位

    Purdue University.;

  • 授予单位 Purdue University.;
  • 学科 Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2008
  • 页码 194 p.
  • 总页数 194
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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