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Fabrication and characterization of gallium nitride electroluminescent devices co-doped with rare earth and silicon.

机译:掺有稀土和硅的氮化镓电致发光器件的制备和表征。

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摘要

Rare Earth (RE) doped III-nitrides are being widely investigated for potential applications in optical communication and displays, due to the wide and direct energy bandgap of GaN resulting in low thermal quenching of RE3+ ion sharp emission from ultraviolet (UV) through visible to infrared (IR) region. The UC Nanolab has been conducting RE doped GaN research for more than 10 years and many achievements were obtained, ranging from material growth to device fabrication.;This dissertation studied RE3+ emission in GaN material, focusing on the effects of electronic impurity (Si) co-doping on RE 3+ luminescence. Advanced RE doped GaN electroluminescent devices (ELDs) were also designed and fabricated. Detailed device characterization was carried out and the effect of co-dopant was investigated.;Eu-doped GaN thin films were grown on sapphire wafers by molecular beam epitaxy (MBE) technique and the growth conditions were optimized for the strongest Eu3+ luminescence. It was found that GaN thin film quality and Eu doping concentration mutually affected Eu3+ luminescence. High quality GaN:Eu thin films were grown under Ga rich condition (III/V>1), but the strongest Eu3+ luminescence was obtained under slightly N rich condition (III/V1). The optimum Eu doping concentration is ∼0.1-1.0at.%, depending on the GaN:Eu thin film quality. Higher growth temperature (>750°C) was also found to enhance Eu3+ luminescence (∼10x) and efficiency (∼30x).;The effect of Si co-doping in GaN:RE thin films was investigated. Eu 3+ photoluminescence (PL) was enhanced ∼5-10x by moderate Si co-doping (∼0.05at. %) mostly due to the increase of Eu3+ PL lifetime, but decreased very fast at high Si co-doping concentration (>0.08at.%). The increase of Eu3+ PL lifetime is possibly due to the incorporation of Si uniformly distributing Eu3+ ions and shielding Eu-Eu interactions. Combined with the increase in excitation cross section and carrier flux, there is a significant enhancement on Eu3+ PL intensity. The electrical properties of GaN:RE thin films were changed from high resistive to weakly n-type due to increased electron concentration introduced by Si co-doping.;GaN:RE ELDs were fabricated and the electrical and optical properties were studied by I-V and electroluminescence (EL) measurements. A hetero-junction PIN structure was designed on n-GaN:Si/GaN:RE/p-Si, employing p-Si substrates as p-type conductive layer. RE3+ ions EL emission was found to be much stronger under forward bias than under reverse bias. The Si co-doping was also studied in GaN:RE ELDs. It was found that Er3+ EL had strong visible & IR emission under forward bias, while there is little or no emission under reverse bias. A pn- hetero-junction structure formed between p-Si and n--GaN:(Si, Er) layers was proposed to be responsible for the emission control. GaN:(Si, Eu) AC thin film ELDs were also fabricated and shown that the Si co-doping increased the Eu 3+ ions emission intensity and efficiency.
机译:由于GaN的宽而直接的能带隙导致RE3 +离子的低热淬灭性,从紫外线(UV)到可见光到紫外光的尖锐发射,稀土(RE)掺杂的III型氮化物正被广泛研究用于光通信和显示器中的潜在应用。红外(IR)区域。 UC Nanolab从事稀土掺杂GaN的研究已有10多年了,从材料生长到器件制造都取得了许多成就。;本文研究了GaN材料中RE3 +的发射,重点研究了电子杂质(Si)co -在RE 3+发光上掺杂。还设计和制造了高级稀土掺杂的GaN电致发光器件(ELD)。进行了详细的器件表征,研究了共掺杂剂的作用。通过分子束外延(MBE)技术在蓝宝石晶片上生长了Eu掺杂的GaN薄膜,并优化了生长条件以实现最强的Eu3 +发光。发现GaN薄膜质量和Eu掺杂浓度相互影响Eu3 +发光。高质量GaN:Eu薄膜在富含Ga的条件下生长(III / V> 1),但是在稍微富含N的条件下(III / V <1)获得了最强的Eu3 +发光。取决于GaN:Eu薄膜的质量,最佳的Eu掺杂浓度为〜0.1-1.0at。%。还发现较高的生长温度(> 750°C)可以增强Eu3 +发光(〜10x)和效率(〜30x)。;研究了GaN:RE薄膜中Si共掺杂的效应。 Eu 3+光致发光(PL)通过适度的Si共掺杂(〜0.05at。%)增强了〜5-10x,主要是由于Eu3 + PL寿命的增加,但是在高Si共掺杂浓度下(> 0.08在。%)。 Eu3 + PL寿命的增加可能是由于掺入了均匀分布的Eu3 +离子并屏蔽了Eu-Eu相互作用的Si。结合激发截面和载流子的增加,Eu3 + PL强度显着增强。 GaN:RE薄膜的电学性质由于Si共掺杂引入的电子浓度增加而从高阻型变为弱n型。;制备了GaN:RE ELD,并通过IV和电致发光研究了电学和光学性质(EL)测量。采用p-Si衬底作为p型导电层,在n-GaN:Si / GaN:RE / p-Si上设计了异质结PIN结构。发现RE3 +离子的EL发射在正向偏压下比在反向偏压下要强得多。还在GaN:RE ELD中研究了Si共掺杂。发现在正向偏压下Er3 + EL具有很强的可见光和红外发射,而在反向偏压下几乎没有或没有发射。提出了在p-Si和n-GaN:(Si,Er)层之间形成的pn异质结结构负责发射控制。还制备了GaN:(Si,Eu)AC薄膜ELD,结果表明,Si共掺杂提高了Eu 3+离子的发射强度和效率。

著录项

  • 作者

    Wang, Rui.;

  • 作者单位

    University of Cincinnati.;

  • 授予单位 University of Cincinnati.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 130 p.
  • 总页数 130
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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