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Single crystal microwave plasma assisted chemical vapor diamond synthesis at high pressures and high power densities

机译：在高压和高功率密度下单晶微波等离子体辅助化学气相金刚石合成

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作者
Lu, Jing;
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作者单位

Michigan State University;

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授予单位 Michigan State University;
学科
学位 Ph.D.
年度 2013
页码 368 p.
总页数 368
原文格式 PDF
正文语种 eng
中图分类
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专利

1. Enhanced Growth Of High Quality Single Crystal Diamond By Microwave Plasma Assisted Chemical Vapor Deposition At High Gas Pressures [J] . Qi Liang, Cheng Yi Chin, Joseph Lai, Applied Physicsletters . 2009,第2期

机译：在高压下通过微波等离子体辅助化学气相沉积促进高质量单晶金刚石的生长
2. Synthesis of single crystal diamond by microwave plasma assisted chemical vapor deposition with in situ low-coherence interferometric control of growth rate [J] . Bushuev E. V., Yurov V. Yu., Bolshakov A. P., Diamond and Related Materials . 2016,第Null期

机译：原位低相干干涉控制生长速度的微波等离子体辅助化学气相沉积法合成单晶金刚石
3. Large Area Single-Crystal Diamond Synthesis by 915 MHz Microwave Plasma-Assisted Chemical Vapor Deposition [J] . Qi Liang, Chih-shiue Yan, Joseph Lai, Crystal growth & design . 2014,第7期

机译：915 MHz微波等离子体辅助化学气相沉积法合成大面积单晶金刚石
4. Microwave plasma assisted synthesis of single crystal diamond at high pressures and high power densities [C] . Lu J., Gu Y., Reinhard D. K., 2011 Abstracts IEEE International Conference on Plasma Science . 2011

机译：微波等离子体辅助高压高功率密度合成单晶金刚石
5. Growth and characterization of large, high quality single crystal diamond substrates via microwave plasma assisted chemical vapor deposition. [D] . Nad, Shreya. 2016

机译：通过微波等离子辅助化学气相沉积法生长和表征大型，高质量的单晶金刚石基底。
6. Synthesis and Mechanical Wear Studies of Ultra Smooth Nanostructured Diamond (USND) Coatings Deposited by Microwave Plasma Chemical Vapor Deposition with He/H2/CH4/N2 Mixtures [O] . S. Chowdhury, J. Borham, S. A. Catledge, -1

机译：He / H2 / CH4 / N2混合物的微波等离子体化学气相沉积法沉积超光滑纳米结构金刚石（USND）涂层的合成及机械磨损研究
7. Microwave Plasma Assisted Synthesis of Single Crystal Diamond at High Pressures and High Power Densities [O] . J. Lu A, Y. Gu A, D. K. Reinhard A, 2012

机译：高压高功率密度的微波等离子体辅助合成单晶金刚石
8. High growth rate homoepitaxial diamond film deposition at high temperatures by microwave plasma-assisted chemical vapor deposition [R] . 1997

机译：通过微波等离子体辅助化学气相沉积在高温下高生长率同质外延金刚石膜沉积

Single crystal microwave plasma assisted chemical vapor diamond synthesis at high pressures and high power densities

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