All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect.

摘要

This thesis proposed and demonstrated a new all-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect cable having a vertical light coupler, which can not only cut down the cost by eliminating metallization process for alignment but also facilitate both in production and application. Throughout the process, polyimide was used as the substrate, coated by Epoclad as claddings, then AP2210B and WPR 5100 were used to fabricate waveguides and 45 degree mirror couplers, respectively. In addition, precisely aligned mirror couplers to waveguides are fabricated by using polymer-based, non-metallic, and transparent alignment marks. Conventional and metallic alignment marks are easy to be detected by camera, when a layer of high reflective material, generally Cr metal, is patterned. However, transparent polymer material is used in this process, as alignment marks made of it which are actually buried phase structures. Therefore, it is hardly to be observed by conventional microscopy system. Hence, to increase the contrast of the alignment marks, I proposed and tested a feature specific alignment camera system for which the shape and depth of the alignment marks are optimized for phase-based imaging, such as phase contrast and Schlieren imaging. The results showed a contrast enhancement of alignment marks image compared to that of a conventional microscopy system. By using the fabrication and alignment process, process for adding waveguides to the structure is identified by using the polymer based alignment marks on the WPR 5100 layer. Mask was made by etch down process using fused silica wafer plate, Cr and AZ 3312 photoresist. At last, the developed and proposed process provides means of all-polymer based fabrication process for a flexible and parallel optical interconnect.