Isotopic composition of boron secondary ions as a function of ion beam fluence.

摘要

The experiment performed in this work isolates and examines the effects of mass on the composition of the sputtered flux from a multi-component target. Chemical complexities are minimized by measuring sputtered ions from a target consisting only of two isotopes of one element. In this case, chemical effects as well as inter-atomic potentials are assumed to be identical for all constituents moving within the target, thus simplifying the target kinematics. Since any non-stoichiometry in the sputtered material should be caused only by the effects of mass on the kinetics in the target, measuring the sputtered material and comparing various analytical predictions with the experimental results leads to a better understanding of mass effects in these targets.The asymmetry was caused by an extra collision mechanism which allowed light particles to backscatter 180100-keV argon and neon were used to sputter an elemental target comprising the two naturally occurring isotopes of boron. The resulting secondary ions were examined with an electrostatic quadrupole mass analyzer. At low beam fluences (