The design and fabrication of a thermal microprobe integrated on an atomic force microscope probe tip.

摘要

thermal microprobe has been designed and built for high resolution temperature sensing. The thermal microprobe consists of a very-thin-film thermocouple junction confined to the very end of a low mass Atomic Force Microscope (AFM) probe tip. Essential to high resolution temperature sensing is the confinement of the thermocouple junction to a short distance at the AFM tip. This confinement is achieved by controlled photoresist coating.;Experimental prototypes have been made with the junction confined to within 0.3 ;Processing begins with double-polished, n-type, 4-inch-diameter, and 300 ;The thermal microprobe gives a high temperature resolution and a high spatial resolution. The thermal mass is kept low in order to cause minimal disturbance of the component under measurement. The thermal output of the microprobe is 5.6