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The dielectric and optical properties of thin films at gigahertz and terahertz frequencies.

机译:千兆赫和太赫兹频率的薄膜的介电和光学特性。

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摘要

Thin films have attracted the attention of physicists because the dimensionally constraint system of the thin films can create an intermediate system between macroscopic systems and molecular systems. This system might show anomalies in the optical, electrical, mechanical, or magnetic properties, compared to the properties of bulk materials. The most conspicuous phenomena associated with the thin films are the anomalies of dielectric and optical properties. This thesis will investigate the anomalous phenomena of thin films by the study of the dielectric and optical properties of a variety of thin films at GHz and THz frequencies (in the millimeter and sub-millimeter wave regime).; A coherent THz wave source and electro-optic detection method are used for the experiment. For a coherent THz frequency source, a THz emitter was used, which was driven by a 100 femto-second pulse from a Ti:sapphire laser to produce the coherent THz wave radiation while the electro-optic detector was gated by the laser pulse split from the laser for the coherent THz wave detection.; The dielectric and optical properties of a variety of thin film materials are discussed and analyzed in detail. The microscopic structural contribution to the dielectric and optical properties of thin films are especially emphasized in this thesis.; Because the currently available methods for the characterization of thin films at the THz frequency have difficulties when the films are in the range of nanometer to micron in thickness, a new method, THz differential time-domain spectroscopy, is developed. The theory of the THz differential time-domain spectroscopy is also developed to obtain information on the real and imaginary parts of dielectric properties and the optical properties. The dual phase lock-in detection was performed to measure the very small differential THz signal with a high dynamic range up to 105. This THz differential time-domain spectroscopy is able to characterize the properties of nanometer scaled thin films.; A variety of materials have been experimentally investigated, including a 930 nm silicon dioxide film, a 1.8 μm parylene-n polymer free standing film, a 1.8 μm parylene-n polymer film on silicon substrate, a 300 nm parylene-n polymer film, a 100 nm tantalum oxide high dielectric film, protein monolayers, water molecule layer on the surface of ice crystal, and a carbon nanotube film.; We found that there are anomalies in the dielectric and optical properties of several thin films. These anomalous behaviors are believed to be caused by fine grain formation, mechanical stresses, formation of interfacial layers, or rough interfaces during thin film deposition processes.
机译:薄膜引起了物理学家的关注,因为薄膜的尺寸约束系统可以在宏观系统和分子系统之间建立中间系统。与散装材料的性质相比,该系统可能显示出光学,电气,机械或磁性性质的异常。与薄膜有关的最明显的现象是介电和光学性质的异常。本文将通过研究各种薄膜在GHz和THz频率下(在毫米波和亚毫米波范围内)的介电和光学特性,研究薄膜的异常现象。实验采用了相干的太赫兹波源和电光检测方法。对于相干的THz频率源,使用了THz发射器,该发射器由来自Ti:蓝宝石激光器的100飞秒脉冲驱动,以产生相干的THz波辐射,而电光检测器由从用于相干太赫兹波检测的激光器。详细讨论和分析了各种薄膜材料的介电和光学特性。本文特别强调了微观结构对薄膜介电和光学性能的贡献。由于当薄膜厚度在纳米到微米范围内时,目前可用的表征THz频率薄膜的方法存在困难,因此,开发了一种新的方法,即THz时域差分光谱法。太赫兹差分时域光谱学的理论也得到发展,以获得有关介电性质和光学性质的实部和虚部的信息。进行了双相锁定检测,以测量非常小的差分THz信号,具有高达10 5 的高动态范围。该太赫兹差分时域光谱仪能够表征纳米级薄膜的特性。已经对各种材料进行了实验研究,包括930 nm二氧化硅膜,1.8μm聚对二甲苯n聚合物自立膜,硅基板上的1.8μm聚对二甲苯n聚合物膜,300 nm聚对二甲苯n聚合物膜, 100 nm氧化钽高介电膜,蛋白质单层,冰晶表面的水分子层和碳纳米管膜。我们发现几种薄膜的介电和光学性能存在异常。这些异常行为被认为是由于薄膜沉积过程中细晶粒的形成,机械应力,界面层的形成或粗糙的界面引起的。

著录项

  • 作者

    Lee, Kwang-Su.;

  • 作者单位

    Rensselaer Polytechnic Institute.;

  • 授予单位 Rensselaer Polytechnic Institute.;
  • 学科 Physics Optics.; Physics Condensed Matter.; Engineering Biomedical.
  • 学位 Ph.D.
  • 年度 2002
  • 页码 108 p.
  • 总页数 108
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学;生物医学工程;
  • 关键词

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