High power aluminum gallium nitride based deep UV LED Lamps: Design, fabrication and characterization.

摘要

Deep ultraviolet light sources wavelength ranging from 250 - 365 nm are used in many applications including water/air purification, analytical scientific instrumentation, bio-agent detection systems, and emerging medical instrumentation. Current UV-LEDs are limited in the market penetration due to the relatively low output power and quantum efficiency despite their inherent benefits of low cost, small size, and low power consumption.;In this dissertation, innovative device fabrication idea and approaches have been made to develop next generation deep UV LED Lamp technology by using micro-pixel based area scalability to Monolithic-Macro Lamp, multi-chip interconnected large area DUV Lamp, lateral injection thin-film (LTF) DUV LED process development.