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Distributed etched diffraction grating demultiplexer.

机译:分布式蚀刻衍射光栅解复用器。

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摘要

This doctoral thesis studies the concept of a distributed etched diffraction grating (DEDG) and presents a methodology to engineer the spectral response of the device. The design which incorporates a distributed Bragg reflector (DBR) at the facets of a conventional etched diffraction grating demultiplexer promises for a superior performance in multiple aspects. Where in a conventional etched diffraction grating, smooth vertical deep etched walls are required in order to realize a low insertion loss device; in the DEDG such requirement is significantly mitigated. Deep etched walls are replaced with shallowly etched diffraction grating facets followed by a DBR structure and as a result devices with significantly lower insertion loss are achievable. The feasibility of the application of DEDG as a wavelength demultiplexer was demonstrated through fabrication and characterization of a prototype device. The proof of concept device was fabricated using the state of the art deep UV optical lithography and reactive ion etching in a nano-photonic silicon-on-insulator (SOI) material platform. The fabricated device was then characterized in the lab.;Furthermore, incorporation of the DBR structure at the facets of the conventional etched diffraction grating decouples the reflection and diffraction functionalities, rendering the DEDG suitable for spectral response engineering. According to the application, the output spectral response of the device can be tailored through careful design and optimization of the incorporated DBR. In this thesis, through numerical simulations we have shown that functionalities such as polarization independent performance and at top insertion loss envelop are viable. A methodology to engineer the spectral response of the DEDG is discussed in details.
机译:该博士论文研究了分布式蚀刻衍射光栅(DEDG)的概念,并提出了一种设计该器件的光谱响应的方法。在传统的蚀刻衍射光栅多路分解器的刻面处结合了分布式布拉格反射器(DBR)的设计有望在多个方面实现卓越的性能。在传统的蚀刻衍射光栅中,为了实现低插入损耗的装置,需要光滑的垂直深蚀刻壁。在DEDG中,这样的要求被大大减轻了。用浅蚀刻的衍射光栅刻面代替DBR结构代替深蚀刻的壁,因此可以实现插入损耗大大降低的器件。通过原型设备的制造和表征,证明了将DEDG用作波长解复用器的可行性。概念验证设备是在纳米光子绝缘体上硅(SOI)材料平台上使用最先进的深紫外光学光刻技术和反应离子刻蚀技术制造的。然后,在实验室中对所制造的器件进行了表征。此外,在传统的蚀刻衍射光栅的刻面上结合了DBR结构,使反射和衍射功能分离,从而使DEDG适用于光谱响应工程。根据该应用,可以通过精心设计和优化内置的DBR来调整设备的输出光谱响应。在本文中,通过数值模拟,我们证明了诸如偏振无关性能和顶部插入损耗包围之类的功能是可行的。详细讨论了设计DEDG光谱响应的方法。

著录项

  • 作者

    Jafari, Amir.;

  • 作者单位

    McGill University (Canada).;

  • 授予单位 McGill University (Canada).;
  • 学科 Engineering Electronics and Electrical.;Physics Optics.
  • 学位 Ph.D.
  • 年度 2012
  • 页码 129 p.
  • 总页数 129
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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