Nonpolar m-plane gallium Nitride-based Laser Diodes in the Blue Spectrum.

摘要

Gallium nitride (GaN), together with its alloys with aluminum and indium, have revolutionized the solid-state optoelectronics market for their ability to emit a large portion of the visible electromagnetic spectrum from deep ultraviolet and into the infrared. GaN-based semiconductor laser diodes (LDs) with emission wavelengths in the violet, blue and green are already seeing widespread implementation in applications ranging from energy storage, lighting and displays. However, commercial GaN-based LDs use the basal c-plane orientation of the wurtzite crystal, which can suffer from large internal electric fields due to discontinuities in spontaneous and piezoelectric polarizations, limiting device performance. The nonpolar orientation of GaN benefits from the lack of polarization-induced electric field as well as enhanced gain. This dissertation discusses some of the benefits and limitations of m-plane oriented nonpolar GaN for LD applications in the true blue spectrum (450 nm). Topics include an overview of material growth by metal-organic chemical vapor deposition (MOCVD), waveguide design and processing techniques for improving device performance for multiple lateral mode and single lateral mode ridge waveguides.