Simulation-based design under uncertainty for compliant microelectromechanical systems.

摘要

The high cost of experimentation and product development in the field of microelectromechanical systems (MEMS) has led to a greater emphasis on simulation-based design for increasing first-pass design success and reliability. The use of compliant or flexible mechanisms can help eliminate friction, wear, and backlash, but compliant MEMS are sensitive to variations in material properties and geometry. This dissertation proposes approaches for design stage uncertainty analysis, model validation, and robust optimization of nonlinear compliant MEMS to account for critical process uncertainties including residual stress, layer thicknesses, edge bias, and material stiffness. Methods for simulating and mitigating the effects of non-idealities such joint clearances, semi-rigid supports, non-ideal loading, and asymmetry are also presented. Approaches are demonstrated and experimentally validated using bistable micromechanisms and thermal microactuators as examples.