Systeme electronique de commande d'actionneurs MEMS dedies a une micropompe a usages biomedicaux.

摘要

An integrated system for high voltage electrostatic and piezoelectric MEMS actuators for biomedical application is introduced. The system includes a programmable microcontroller, a programmable DC/DC converter, a multi output high voltage interface and electrostatic MEMS actuators. The system produces high output voltages (15--300 V) and can control a large variety of MEMS capacitive (1 to 50 pF) and resistive (>1MO) loads by combining diverse technologies. This system proves that technologies, such as low voltage CMOS of different processes, high voltage DMOS and MEMS, can interact, communicate and even be integrated as a System In Package (SIP), providing significant size and cost reductions. The system was programmed to control electrostatic and piezoelectric MEMS micropump actuators. The DC/DC converter was made from components of different technologies and two addressable high voltage CMOS interfaces were fabricated with DALSA Semiconductor's 0.8 mum high voltage process. (Abstract shortened by UMI.).