We measure and describe surface microstructure and subsurface damage (SSD) induced by microgrinding of hard metals and hard ceramics used in optical applications. We examine grinding of ceramic materials with bonded abrasives, and, specifically, deterministic microgrinding (DMG). DMG, at fixed nominal infeed rate and with bound diamond abrasive tools, is the preferred technique for optical fabrication of ceramic materials. In DMG material removal is by microcracking. DMG provides cost effective high manufacturing rates, while attaining higher strength and performance, i.e., low level of subsurface damage (SSD).; A wide range of heterogeneous materials of interest to the optics industry were studied in this work. These materials include: A binderless tungsten carbide, nonmagnetic Ni-based tungsten carbides, magnetic Co-based tungsten carbides, and, in addition, other hard optical ceramics, such as aluminum oxynitride (Al23O27N5/ALON), polycrystalline alumina (Al2O3/PCA), and chemical vapor deposited (CVD) silicon carbide (Si4C/SiC). These materials are all commercially available.; We demonstrate that spots taken with magnetorheological finishing (MRF) platforms can be used for estimating SSD depth induced by the grinding process. Surface morphology was characterized using various microscopy techniques, such as: contact interferometer, noncontact white light interferometer, light microscopy, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The evolution of surface roughness with the amount of material removed by the MRF process, as measured within the spot deepest point of penetration, can be divided into two stages. In the first stage the induced damaged layer and associated SSD from microgrinding are removed, reaching a low surface roughness value. In the second stage we observe interaction between the MRF process and the material's microstructure as MRF exposes the subsurface without introducing new damage. Line scans taken parallel to the MR fluid flow direction, show the microroughness contributions due to the interactions between MR fluid abrasive particles and the material's microstructure, whereas the MRF process signature is detected by measuring microroughness perpendicular to the MR fluid flow. We study the development of texture for these hard ceramics with the use of power spectral density (PSD).
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