Chapter 1 Background
1.1 Introduction
1.2 Basic properties of graphene and its applications
1.2.1 Basic properties of graphene
1.2.2 Applications of graphene
1.3 Research progress in the synthesis of graphene
1.3.1 Mechanical exfoliation
1.3.2 Epitaxial growth on silicon carbide
1.3.3 Oxidation-reduction method
1.3.4 Chemical vapor deposition
1.4 Research progress of graphene-based gas sensors
1.5 The main work and significance of this thesis
Chapter 2 Methodology of material preparation, device fabrication and characterization
2.1 Material synthesis
2.2 Characterization and testing
2.2.1 Optical microscopy
2.2.2 Atomic force microscopy
2.2.3 Raman spectrometry
2.2.4 Scanning electron microscopy
2.2.5 X-Ray photoelectron spectroscopy
2.2.6 Probe station
2.3 Device fabrication
2.3.1 Photo lithography
2.3.2 Etching process
2.3.3 Metal evaporation
2.3.4 Package
2.4 Summary
Chapter 3 Preparation process of CVD graphene-based sensors
3.1 Synthesis, transfer, characterization and testing of CVD graphene
3.1.1 Optimization of the growth of CVD graphene
3.1.2 Optimization of graphene transfer process
3.1.3 Electrical properties test of CVD graphene FET
3.2 Preparation process of sensor
3.2.1 Structure design of graphene-based sensor
3.2.2 The fabrication of graphene-based sensor
3.3 Summary
Chapter4 Design and construction of sensor measurement system
4.1 Gas configuration system
4.2 Design of measurement chamber
4.2.1 Temperature control of sample holder
4.2.2 Fine-tuned light control
4.3 Collection and processing of data
4.4 Summary
Chapter 5 Gas sensitivity of graphene-based gas sensors
5.1 Sensing performance of graphene-based sensors
5.1.1 NO2 gas sensor based on CVD graphene
5.1.2 The UV-assisted graphene-based sensors
5.2 Gas sensing mechanism of graphene
5.3 Summary
Chapter 6 Conclusion and prospective
6.1 Conclusion
6.2 Prospective
参考文献
Published papers and scientific research participation
致谢
天津大学;
