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英文文摘
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Chapter 1 Profile Monitoring and Diagnosis—Part Ⅰ
1.1 Overview
1.2 Control chart based on change—point model for monitoring linear profiles
1.2.1 Introduction
1.2.2 Control chart for linear profiles
1.2.3 Performance comparisons
1.2.4 Conclusions and considerations
1.2.5 Appendix
1.3 A self—starting control chart For linear profiles
1.3.1 Introduction
1.3.2 The self—starting chart for linear profiles
1.3.3 An illustrative example
1.3.4 Performance comparisons
1.3.5 Conclusions and considerations
1.3.6 Appendix
1.4 Monitoring general linear profiles using multivariate EWMA schemes
1.4.1 Introduction
1.4.2 The motivating example:monitoring a deep reactive ion etching process
1.4.3 A novel multivariate EWMA chart for monitoring a general linear profile
1.4.4 Adding VSI features to the proposed profile monitoring scheme
1.4.5 Monitoring performance eomparisons
1.4.6 Diagnostic aids in profile monitoring
1.4.7 The DRIE monitoring case revisited
1.4.8 Conclusions
1.4.9 Appendix
Chapter 2 Profile Monitoring and Diagnosis——Part Ⅱ
2.1 Overview
2.2 Adaptive nonparametric comparison of regression curves
2.2.1 Introduction
2.2.2 Methodology
2.2.3 Small—sample performance assessment
2.2.4 Conclusion
2.2.5 Appendix:Proofs
2.3 Monitoring profiles based on nonparametric regression methods
2.3.1 Introduction
2.3.2 Methodology
2.3.3 Charting performance comparisons
2.3.4 An application
2.3.5 Conclusions and considerations
2.3.6 Appendix:Technical details
2.4 Nonparametric control chart for monitoring profiles using change—pointformulation and adaptive smoothing
2.4.1 Introduction
2.4.2 Methodology
2.4.3 Application to monitoring a deep reactive ion etching process
2.4.4 Concluding Remarks
2.4.5 Appendix:Asymptotical properties of the GLR test(T)k,t
2.5 Profile monitoring with arbitrary design
2.5.1 Introduction
2.5.2 Methodology
2.5.3 A simulation study
2.5.4 A real—data application
2.5.5 Concluding remarks
2.5.6 Appendix:Proofs
2.6 Nonparametric profile monitoring by mixed effects modeling
2.6.1 Introduction
2.6.2 Methodology
2.6.3 A simulation study
2.6.4 A real—data application
2.6.5 Concluding remarks
2.6.6 Appendix:Technical details
Chapter 3 Nonparametric Control Chart Using Change—Point Model
3.1 Introduction
3.2 Nonparametric control chart
3.2.1 The change—point model for a fixed sample
3.2.2 Our proposed control chart and its design
3.2.3 The diagnostic aids and implementation
3.3 Performance comparisons
3.3.1 Normal distribution setting
3.3.2 Non—normal distribution setting
3.4 Conclusions and considerations
Chapter 4 Monitoring Autocorrelated Processes Using Variable Sam—piing Schemes at Fixed—Times
4.1 Introduction
4.2 Methodology
4.2.1 Statistical models for an autocorrelated process
4.2.2 Control schemes of the VSFT(X)charts for autocorrelated process
4.3 Numerical study
4.3.1 Measures of VSFT charting performance
4.3.2 Performance assessment
4.3.3 Guideline for designing the VSFT charts
4.4 Conclusions
4.5 Appendix:Technical details
Chapter 5 Comparisons of Control Schemes for Monitoring the Meanof Processes Subject to Drifts
5.1 Introduction
5.2 The control charts for monitoring drifts
5.3 Theoretical comparisons of various schemes
5.4 Numerical results
5.5 Conclusions and discussions
5.6 Appendix:Proofs
Chapter 6 Multivariate Statistical Process Control Using LASSO
6.1 Introduction
6.2 Methodology
6.2.1 LASSO for variable selection
6.2.2 LASSO—based testing
6.2.3 Phase Ⅱ MSPC
6.2.4 Post—signal diagnostic
6.3 A simulation study
6.4 An application
6.5 Concluding remarks
6.6 Appendix:Proofs
Chapter 7 SPC for Multistage Processes
7.1 Overview
7.2 Phase Ⅰ analysis:a change point approach
7.2.1 Introduction
7.2.2 Conventional traditional change—point approaches
7.2.3 The directional multivariate change—point method
7.2.4 Performance comparisons
7.2.5 Conclusions
7.3 Phase Ⅱ Monitoring and Diagnosis
7.3.1 Conventional SPC schemes
7.3.2 Directional MEWMA monitoring schemes
7.3.3 Corresponding diagnostic schemes
7.3.4 An illustration of the implementation steps
7.3.5 Performance comparisons
7.3.6 Conclusion
7.4 Appendix:Proofs
Chapter 8 Concluding Remarks
Reference
Acknowledgements
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