Preparation of ZrO_2 and AI_2O_3 Thin-films on Stainless Steel by Spray Pyrolysis

摘要

We have investigated the deposition of ZrO_2 and Al_2O_3 films on a stainless steel (SS) substrate by spray pyrolysis method. The ZrO_2 films were deposited from aqueous solution of zirconium dinitrate oxide. For Al_2O_3 films, a boehmite sol was used. The specific surface areas of samples were determined by the BET-method and sample surfaces were characterized by scanning electron microscopy and X-ray photoelectron spectroscopy. The spray pyrolysis method permits the preparation of ZrO_2 and Al_2O_3 thin films on SS with good adhesion. This method enables preparation of oxide layers with relatively high specific surface area, suitable for applications as catalysts supports.