CAPABLE PROCESSES BY OPTICAL METROLOGY

摘要

Today, optical metrology is already anrnessential factor for manufacturing processes. Withinrndifferent tasks optical metrology guarantees increasingrncapability of processes. Optical measurement techniquesrnsecure fast and precise process steps. Therefore, opticalrnmethods integrated into manufacturing lines are well suitedrnfor measurement tasks. Their setups are modular and theyrnhave defined interfaces to the electronic periphery. Further,rnoptical measurement techniques are very versatile, flexiblernand most accurate. They are used more and more for noncontactrndistance measurement, shape and surface inspectionrnas well as for analysis of dynamic processes. Due to theirrnability for miniaturisation optical sensors are well suited forrnthe direct use in manufacturing systems and productionrnenvironment.rnThus, the goal of this article is to illustrate the efficientrnuse of optical measurement systems in differentrnmanufacturing processes. Detailed examples show thatrnoptical metrology is a key factor for sucessfulrnmanufacturing. Finally, perspectives and trends of opticalrnmeasurement techniques in the field of productionrntechnology will be presented.