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Overview of the program on soft X-ray lasers and their applications at Princeton

机译:普林斯顿大学有关软X射线激光器的程序及其应用的概述

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摘要

In the last several years, rapid progress in the development of soft X-ray lasers (SXL) has been observed at a number of laboratories worldwide. Although SXLs are very "young" devices they have already been used for microscopy and holography, and new ideas are emerging for broader application of SXLs to microscopy, holography and lithography. This paper describes the work at Princeton University on the development of a soft x-ray imaging transmission microscope using a SXL as a radiation source and work on the development of a novel soft x-ray reflection microscope and its application to biological cell studies and lithography. Progress in the development of a photopumped VUV laser (60 nm), and programs for the development of a small scale SXL and for the application of a powerful subpicosecond KrF laser system are also discussed.
机译:在过去的几年中,全世界许多实验室都观察到了软X射线激光器(SXL)的快速发展。尽管SXL是非常“年轻”的设备,但它们已经用于显微镜和全息术,并且出现了新的想法,以将SXL广泛应用于显微镜,全息和光刻。本文介绍了普林斯顿大学在使用SXL作为辐射源的软X射线成像透射显微镜的开发方面的工作,以及在新型软X射线反射显微镜的开发及其在生物细胞研究和光刻中的应用的工作。还讨论了光泵VUV激光器(60 nm)的开发进展,以及小型SXL的开发和强大的亚皮秒KrF激光系统的应用程序。

著录项

  • 来源
    《X-ray lasers 1990》|1990年|51-63|共13页
  • 会议地点 York(GB)
  • 作者

    S. Suckewer; K. Ilcisin;

  • 作者单位

    Princeton University, Plasma Physics Laboratory and Mechanical Aerospace Engineering Dept., Engineering Quadrangle, Princeton, N.J. 08540, U.S.A.;

    Princeton University, Plasma Physics Laboratory and Mechanical Aerospace Engineering Dept., Engineering Quadrangle, Princeton, N.J. 08540, U.S.A.;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 激光器;
  • 关键词

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