Interferometric Tomography Metrology of Conformal Optics

摘要

Conformal windows and domes improve aerodynamic quality of missiles and aircraft but introduce significant optical aberrations. These aberrations can be compensated, provided both window and corrective optics are fabricated to high tolerances. Highly accurate measurement of conformal optics is required for success of the fabrication process. This paper describes the development of the Interferometric Tomography - a new tool for metrology of conformal aspheric optics, including optics with very high aberrations. The metrology system is designed to measure wavefront aberrations as well as the optical figure of both surfaces.