Advances in freeform optical metrology using a multibeam low-coherence optical probe (Quad-Probe)

摘要

Conformal windows reduce drag, but introduce optical aberrations. Corrector optics minimize such optical aberrations, but they feature complex surfaces that cannot presently be measured interferometrically. To address this problem, ASE Optics has developed a non-contact "Quad-Probe" that measure the position and orientation of surfaces. By scanning the probe over the surface of the optic, a 3D model of the interior and exterior surfaces can be built. Furthermore, the Quad-Probe can be used inside a polishing machine, and feedback from the Quad-Probe can be used to guide the scanner in measuring an unknown part.