TWO-DIMENSIONAL ENCODER WITH PICOMETER RESOLUTION USING MULTI-TUNNELING PROBES SCANNING TUNNELING MICROSCOPE AND REGULAR CRYSTALLINE SURFACE

摘要

In the paper, we propose a two-dimensional (2-D) encoder with picometer resolution using the MTP-STM as detectors and the graphite crystalline lattice as a reference. We also propose a fast lateral dither vibration applied to one STM tip to obtain multi-current-signals from multi-points in semi real-time way. The proposed methods were compared with a capacitance sensor. The experimental results show that the proposed method has the capability for measuring 2-D lateral displacement with an uncertainty on the order of 10 pm with a maximum measurement speed of 100 nm/s or more.