NEW HYBRID ACTUATOR DESIGN WITH NANOMETER RESOLUTION

摘要

The investigation in nanotechnology requires new positioning tools with extremely high resolution combined with a large travel range. In new hybrid stage design the piezo part should be separated via flexure design and should be operate with only one incremental sensor. For high resolution hybrid systems a new type of embedded controller and a two path control algorithm shows successful results for smallest steps as for long travel range with nano/ picometer resolution.