CHEMISTRY CONSISTENCY ANALYSIS OF TUNGSTEN-DOPED DIAMOND-LIKE CARBON (DLC) COATINGS

摘要

Tungsten-doped diamond-like carbon (DLC) coatings have been magnetron sputtered onto 52100 steel with chromium and chromium/tungsten carbide dual interlayers using a Hauzer Techno Coating HTC 1200 4 UBM unbalanced magnetron deposition system. Internal fixturing to the deposition chamber rotates parts to be coated with a two degree of freedom system. By design, at certain intervals during the deposition, the acetylene flow is linearly altered to change film characteristics throughout the film. AES sputter depth profiling analysis shows that the fixture rotational system, designed to uniformly coat parts, causes localized chemistry variations in the coating. For a given location, the AES depth profile also clearly documents the intervals when acetylene flow was constant and when the flow was ramped.