SPATIAL FILTERING WITH PIEZOELECTRIC FILMS VIA POROUS ELECTRODE DESIGN

摘要

This paper describes and demonstrates a technology for making distributed sensors with spatial filtering properties. The concept is based on a porous electrode with variable porosity, which allows to tailor the effective piezoelectric coefficients in two dimensions. Two applications are considered: (ⅰ) a modal filter for a cantilever beam, and (ⅱ) a volume displacement sensor for a simply supported plate.