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C-axis Oriented ZnO Piezoelectric Thin Films Prepared by RF Magnetron Sputtering for Saw Filters

机译：C轴取向ZnO压电薄膜，由RF磁控溅射用于锯过滤器

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Weihua Huang;
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1. Electro-optic effect in c-axis oriented ZnO thin films prepared by rf magnetron sputtering [J] . Vikash Gulia, Sanjeev Kumar Optical Materials . 2007,第7期

机译：射频磁控溅射制备的c轴取向ZnO薄膜的电光效应
2. Highly c-axis oriented ZnO:Ni thin film nanostructure by RF magnetron sputtering: Structural, morphological and magnetic studies [J] . R. Siddheswaran, Jarmila Savkova, Rostislav Medlin, Applied Surface Science . 2014,第octa15期

机译：射频磁控溅射高度c轴取向的ZnO：Ni薄膜纳米结构：结构，形态和磁性研究
3. Piezoelectric Response Evaluation of ZnO Thin Film Prepared by RF Magnetron Sputtering [J] . Da-Long Cheng, Kuo-Sheng Kao, Chia-Hua Liang, MATEC Web of Conferences . 2017,第1期

机译：RF磁控溅射制备的ZnO薄膜的压电响应评价
4. C-axis Oriented ZnO Piezoelectric Thin Films Prepared by RF Magnetron Sputtering for Saw Filters [C] . Weihua Huang International Conference on Computer Applications and Systems Modeling . 2013

机译：C轴取向ZnO压电薄膜，由RF磁控溅射用于锯过滤器
5. Manufacturing gallium doped ZNO thin films suitable for use in thin film transistors using unbalanced magnetron sputtering. [D] . Jones, Timothy R. 2013

机译：使用不平衡磁控溅射制造适用于薄膜晶体管的掺镓ZNO薄膜。
6. Processing and Study of Optical and Electrical Properties of (Mg Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application [O] . Chayma Abed, Susana Fernández, Selma Aouida, 2020

机译：射频磁控溅射制备（MgAl）共掺杂ZnO薄膜的光电性能研究与研究
7. Processing and Study of Optical and Electrical Properties of (Mg, Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application [O] . Chayma Abed, Susana Fernández, Selma Aouida, 2020

机译：由RF磁控溅射制备的（Mg，Al）共掺杂ZnO薄膜的光学和电性能的加工和研究光伏应用

C-axis Oriented ZnO Piezoelectric Thin Films Prepared by RF Magnetron Sputtering for Saw Filters

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