MOCVD of rhenium-containing complex oxides with the new thd-precursor

摘要

Complex oxides containing rhenium, for instance, magnetoresistive double perovskites and Re-stabilised Hg high T_c superconductors, attract a significant attention. We developed a volatile rhenium compound compatible with the thd-complexes of metals by reaction of the product of the metal electrolysis with 2,2,6,6-tetramethylheptan-3,5-dion at the elevated temperature. The details of crystal structure of the compound are discussed. The blocks [ReO(thd)_2](ReO_4) form layered molecular structure. The compound was used in the single source MOCVD together with thd-complexes of different metals (Ba, La, Ho) producing films of the double oxides. The Re-stabilised Re_x(Ba,Sr)_2Ca_2Cu_3O_y (x=0.1-0.3) precursor films with high composition homogeneity and surface smoothness were deposited to be saturated with Hg under the high pressure.