Laser diode applications for contamination control in microelectronicsfabrication processes,

摘要

Abstract: The increasing complexity of semiconductor devices and corresponding dimensions decreasing till the most advanced semiconductor chips manufactured in 0.35 $mu@m or 0.25 $mu@m need more cleanliness technological conditions. From this wide field the particles are not even detected or detectable in today's fabs will become killer contaminants of future technology of 0.18 $mu@m. The particle must first be detected before they can be eradicated. For this reasons the most recommended investigation apparatus are optical particle counters and condensation nucleus counter for determining of airborne p article concentration and as ultrapure water chemicals, gases and vacuum particle counter. In the paper I have analyzed the laser diode application as light sources with the counting results sizing data generation and performance parameters which shown the benefits of their using. All the systems presented can be used for monitoring of particle concentrations for ultrapure fluids from microelectronics fab processes and can be recommended to all microelectronics fabs.!0