An approach to developing a Fabry-Perot filter by a single fabrication step for gas sensing applications

摘要

In this work, an influential approach has been presented for the fabrication of an interference filter. The construction of such filters turns the layer stack assembly on its one side which makes it possible to use air as a low index material. All the layers of a particular material (high index) are deposited at the same time which transforms the layer thickness into line thickness and is obtained by patterning the filters using photolithography. This results in the formation of a complex filter design with high volume and low production cost.